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Accueil > Séminaires et conférences > Séminaires, soutenances de thèses et HDR précédents > 2013 > Soutenances de thèses et HDR 2013 > Thèse de Jaime Arancibia le vendredi 21 juin à 10h

Thèse de Jaime Arancibia le vendredi 21 juin à 10h

Jaime Arancibia - Negative Ion Source Powered by a Low-Frequency, -Internal-Coil Inductive Discharge

Lieu : Palaiseau, amphi Becquerel

Abstract :

This thesis is about the development of a high efficiency ion-ion (or
negative ion) source useful for many industrial applications. The source
is an ICP with an internal coil driven at 5-6 MHz, with very high power
transfer efficiency. Appropriate langmuir probes were developed to
diagnose this source, which works under difficult conditions : (i) Strong
RF plasma potential (ii) magnetized plasmas (iii) Small conducting surface
(iv) Plasma in corrosive gases with large amount of negative ions. A
Matchbox had to be developed to work under several kinds of magnetized discharges. Instabilities were found for pure argon and Ar/SF6 gas
mixtures, and plasmoid formation and rotation around the internal coil is proposed as an explanation of the instability. In this source we have also found strong RF plasma potential variation, despite de the very low capacitive coupling between the antenna and the plasma. The RF Hall effect was proposed as the explanation for this phenomenon.


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Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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Exploitant du site : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Pascal Chabert (Directeur)