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Accueil > Séminaires et conférences > Séminaires, soutenances de thèses et HDR précédents > 2011 > Séminaires 2011 > Lundi 5 décembre 2011 à 11h

Lundi 5 décembre 2011 à 11h

Paola Diomede (Plasma Processing Laboratory, University of Houston, USA) :

’Kinetic Modeling of Capacitively Coupled Plasmas in H2 and Ar’

Lieu : Palaiseau, salle de réunion du CPHT

Radio frequency (RF) capacitively coupled plasmas (CCPs) are used routinely for thin film deposition and etching, as well as chemical modification of material surfaces. In such applications, the flux and energy of reactive radicals and ions bombarding the substrate are of critical importance. Computer simulations, in combination with well-defined experiments, are instrumental in understanding plasma creation and transport as well as plasma–surface interactions. Results obtained with a one-dimensional hybrid model for RF CCPs in hydrogen developed at the University of Bari in Italy will be illustrated for continuous wave as well as pulsed plasmas. In particular, results will clarify the effect of electron and ion reactions, the ion heating, the chemistry of excited molecules, the non-equilibrium distributions, the surface catalytic reactions, on the spatiotemporal evolution of charged and neutral species and their wall flux and energy distributions. Simulation predictions will be compared to experimental measurements, and the results of fluid models from other research groups. Moreover a one dimensional Particle-in-Cell simulation with Monte Carlo Collisions (PIC-MCC), by means of the XPDP1 code, was conducted of the application of DC voltage steps (and staircases) on an electrode, during the afterglow of a capacitively-coupled pulsed argon discharge, to control the energy of ions incident on the counter-electrode holding the wafer.

Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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Exploitant du site : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Pascal Chabert (Directeur)