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Accueil > Séminaires et conférences > Séminaires, soutenances de thèses et HDR précédents > 2010 > Séminaires 2010 > Le mardi 1er juin à 11h

Le mardi 1er juin à 11h

Rod Boswell, Tim Senden
RSPE, ANU
Canberra, ACT, Australia
rod.boswell anu.edu.au

Le mardi 1er juin à Palaiseau (salle de conférence du LIX)

Focussed Inert Ion Beam systems for 3D rock tomography on the nano-scale

To study the porosity and chemical properties of many natural and man-made materials, analysis is required across a broad range of length scales. Such materials include, porous rock, bone and sintered materials. The ANU has developed imaging and measuring techniques using conventional FIB/SEM instruments constructed mathematical models of the 3D fluid flow through the materials. This analysis often requires the imaging technique to resolve nanoscopic structures (ie <50nm resolution) across micro- or macroscopic regions of interest, throughout a 3 dimensional body. Tomographic sectioning is done today with a gallium FIB, removing 20-200nm thick slices to reveal new layers in a 50x50um cross-sectioned face. Each new layer is iteratively imaged with 50nm resolution with an in-situ SEM. However. with a maximum gallium beam current of 20nA, ion beam milling time is prohibitively time consuming for this measurement technique to become commercially viable.
Hence, it is necessary to increase the FIB milling speed. Unfortunately, above 10nA the gallium LMIS FIB suffers from a rapid increase in spot size. This transition results from an increase in spherical aberration coefficient for the FIB optics, at the large aperture angles required to transport high ion beam currents from an ion source with a relatively low angular intensity ( 20uA/sr).
On the other hand, a plasma ion source based FIB developed from original ANU research and now commercialised as the Hyperion FIB by Oregon Physics (OP), offers a significant advantage for high current focused ion beams since it has an angular intensity that is approximately 3 orders of magnitude higher than the LMIS, while having a brightness that has produced unprecedented spot sizes for a plasma source at low beam currents.
A comparison of the gallium LMIS FIB with an OP xenon Hyperion FIB is presented along with the 3D structure of the rock sample so derived.


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Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Pascal Chabert (Directeur)