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Accueil > Séminaires & Soutenances > Séminaires, soutenances de thèses et HDR précédents > 2019 > Séminaires 2019 > Le jeudi 7 novembre 2019 à 10h30

Le jeudi 7 novembre 2019 à 10h30

Lieu : Palaiseau, salle L.Michel (CPhT)

10h30 : Accueil café

10h45 : Séminaire

Title : Molecular dynamics simulations for a better understanding of plasma-surface interactions in low-pressure RF plasmas

Speaker : Emilie Despiau-Pujo (Chercheuse au LTM, Université Grenoble Alpes/CNRS)

Abstract :
Low-temperature RF plasmas have been used in the semiconductor industry
since the 1960s to process materials and enable a continuous miniaturization
of devices. In advanced nano-electronics, innovative transistor architectures with new materials are being implemented to replace conventional planar bulk transistors. Featuring ultrathin layered materials (a few nm-thick), these structures must be patterned with a nanometric precision to preserve the electronic properties of active layers. In particular, plasma-induced damage and reactive layers formed during the etch processes must be carefully controlled, a challenge which cannot be addressed by conventional continuous- waves CCP or ICP plasmas.
In this presentation, I will discuss various examples of molecular dynamics simulations – coupled with experiments – which were developed to investigate alternative plasma technologies (pulsed or low-Te plasmas, plasma-enhanced ALE, ion implantation-based processes) and their potential for pattern transfer on ultrathin layered materials (silicon, silicon nitride, graphene). These atomic-scale simulations are used to provide information about the fundamental mechanisms of plasma-surface interaction (i.e. how the flux and energy of plasma species affect the structural and chemical modification of substrates) and to understand the phenomena governing the etch process.

CNRS Ecole Polytechnique Sorbonne Université Université Paris-Saclay Observatoire de Paris
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Mentions légales
Exploitant du site : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Dominique Fontaine (Directrice)