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Accueil > Séminaires et conférences > Séminaires, soutenances de thèses et HDR précédents > 2018 > Séminaires 2018 > Le jeudi 28 juin 2018 à 10h30

Le jeudi 28 juin 2018 à 10h30

Orateur : Jean-Maxime Orlac’h (LPICM)

Lieu : room CPHT ex LIX

Titre
Modeling of silane and hydrogen plasma discharges at LPICM : Towards a unified description of charged species transport in fluid plasma models.

Résumé
In this talk we will present recent developments carried out in collaboration between LPICM (Laboratoire de Physique des Interfaces et des Couches Minces) and CMAP (Centre de Mathématiques Appliquées) in the modeling of radio-frequency discharges.
We first present the derivation from kinetic theory of a multicomponent fluid model for non-thermal polyatomic plasmas [1]. A generalized Chapman-Enskog method is applied, based on a multi-scale asymptotic expansion over the Knudsen number and the ratio of electrons to heavy-species characteristic masses.
We then present a self-consistent model for silane nanodusty discharges recently implemented at LPICM. The plasma phase is treated as a fluid, while the silicon nanoparticles are handled through an aerosol sectional model. The model has been applied to experimental conditions leading to epitaxial growth of crystalline silicon [2].
The study of the self-bias potential is then considered as a tool for a detailed comparison between our fluid model and experimental data. The use of tailored voltage waveforms allows access to a wide range of discharge conditions in a simple one-dimensional framework. Several conclusions on charged species transport properties are drawn from comparison of our fluid calculations with experimental measurements carried out at LPICM and numerical simulations using a hybrid fluid/kinetic model [3].

[1] “Kinetic theory of two-temperature polyatomic plasmas”. J.-M. Orlac’h, V. Giovangigli, T. Novikova, P. Roca, Physica A, 494, 503—546, 2018.
[2] “Modeling of silane plasma discharges including nanoparticle dynamics for photovoltaic applications”, J.-M. Orlac’h, PhD Thesis, Université Paris Saclay, 2017.
[3] “Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms : excitation dynamics and ion flux asymmetry“, B. Bruneau, P. Diomede, D. J. Economou, S. Longo, T. Gans, D. O’Connell, A. Greb, E. Johnson, J.-P. Booth, Plasma Sources Sci. Technol., 25, 045019, 2016.


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Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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©2009-2019 Laboratoire de Physique des Plasmas (LPP)

Mentions légales
Exploitant du site : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Pascal Chabert (Directeur)