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Accueil > A propos du LPP > Communication > Actualités archivées > 2014 > Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP

Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP

The best poster prize was awarded to Mickaël Foucher at the PESM (Plasma Etch and Strip for Microelectronics) workshop which took place in Grenoble, 12 and 13th May. The poster entitled “Inductively-coupled plasmas of Cl2/O2 : measurements of atoms, ClxOy and electron densities”, presented many results obtained by the cold plasmas group of LPP.


These results are part of a comprehensive study of plasmas in Cl2, O2 and their mixtures, a system which is widely used for etching in the microelectronics industry. The absolute densities and temperatures of many transient species present in the plasma were measured using a range of diagnostic techniques, including Two-photon absorption Laser-Induced Fluorescence (TALIF) and a new high-sensitivity ultraviolet absorption bench. These results will improve fundamental understanding of the mechanisms occurring in these complex and industrially important systems.
Mickaël Foucher is a .


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Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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