LPP - Laboratoire de Physique des Plasmas - UMR 7648 - Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP

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Home > About us > Media > Archived news > 2014 > Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP

Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP

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The best poster prize was awarded to Mickaël Foucher at the PESM (Plasma Etch and Strip for Microelectronics) workshop which took place in Grenoble, 12 and 13th May. The poster entitled “Inductively-coupled plasmas of Cl₂/O₂: measurements of atoms, Cl_xO_y and electron densities”, presented many results obtained by the cold plasmas group of LPP.

These results are part of a comprehensive study of plasmas in Cl₂, O₂ and their mixtures, a system which is widely used for etching in the microelectronics industry. The absolute densities and temperatures of many transient species present in the plasma were measured using a range of diagnostic techniques, including Two-photon absorption Laser-Induced Fluorescence (TALIF) and a new high-sensitivity ultraviolet absorption bench. These results will improve fundamental understanding of the mechanisms occurring in these complex and industrially important systems.
Mickaël Foucher is a .

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Best poster prize at the PESM workshop awarded to Mickael Foucher, PhD student at LPP