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Jean-Paul Booth
Status : Research Director, 1st class, CNRS
Low Temperature Plasmas Team
Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902
Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex
Research interests
Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.
Brief vitae
2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK
Distinctions :
2019 : AVS Plasma Science & Technology Division Prize
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford
Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009
Recent Publications
2020
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2019
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2018
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Recent Invited Conferences :
A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas,
JP Booth, A Chatterjee, O Guaitella, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova,
Central European Symposium on Plasma Chemistry
Gozd Martuljek, Slovenia 26-30 May 2019
A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas,
JP Booth, A Chatterjee, O Guaitella, C Drag, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova
Frontiers in low Temperature plasma simulation
Bad Honnef, Germany, 12-16 May 2019
Vacuum ultraviolet absorption spectroscopy of oxygen discharges,
JP Booth,
3rd European Conference on Plasma Diagnostics
Lisbon, Portugal. 6-9 May 2019
Novel diagnostics to unravel fundamental processes in oxygen plasmas,
JP Booth, A Chatterjee, O Guaitella, C Drag, D Lopaev, S Zyryanov, T Rakhimova, N De Oliveira, L Nahon, C Western,
7th International Conference on Advanced Plasma Technologies,
Hue, Vietnam, 24 Feb-1 Mar 2019
Negative Ions in Plasmas,
J.P.Booth,
Plasma School Master Class, Bad Honnef, DE, 12-13 Oct 2018
High-resolution VUV absorption diagnostics of discharges in oxygen, J.P.Booth, A.Chatterjee, O.Guaitella, N.de Oliveira, L.Nahon, and C.M.Western,
20th Gaseous Electronics Meeting
Magnetic Island,Townsville, Queensland, Australia, 22-24 June 2018,
Kinetics of atoms and metastable molecules in oxygen plasmas revisited : an experimental study
JP Booth, A Chatterjee, O Guaitella, A-S Morillo-Candas, C Drag, D Lopaev, S Zyryanov, N De Oliveira, L Nahon.
10th EU-Japan Joint Symposium on Plasma Processing,
Okinawa, Japan, 4-7 December 2017.
