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Jean-Paul Booth
Status : Research Director, 1st class, CNRS
Low Temperature Plasmas Team
Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902
Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex
Research interests
Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.
Brief vitae
2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK
Distinctions :
2023 : Nishizawa Prize of the Dry Process Symposium (Japan)
2019 : AVS Plasma Science & Technology Division Prize
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford
Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Laser-Aided Plasma Diagnostics, Chair : 2013& 2015, commitee 2017, 2019,2023, 2025
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009
Recent Invited Conferences :
Measuring surface reactivity in plasmas-beyond the constant reaction probability model, J.P.Booth, A.Chatterjee, S.Zhang, A Volynets, O.Guaitella, D Lopaev, D. Voloshin, Y.Mankelevich, K.Mansfield, G.Ritchie, V Guerra, SASP, Andalo, Italy, 28 Jan-2 Feb 2024
Improving our understanding of plasma-surface interactions through in-situ measurements, J-P Booth, Dry Process Symposium Nishizawa Prize Lecture, Nagoya, Japan, 21-22 November 2023
Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model ? J-P Booth, GEC, Ann Arbor, MI, USA, 9-13 October 2023
What We Still Don’t Know About Plasmas in Simple Diatomic Gases- or Using a DC Plasma in Pure O2 as an Ideal Test-Bed for Experimental Validation of Simulations, AVS Plasma Prize Invited Talk, J-P Booth. AVS Symposium, Pittsburgh, PA, USA, 7-11 November 2022
A new look at oxygen plasmas : Quantitative VUV and IR absorption spectroscopy of reactive intermediates, Journées de Spectroscopie Moleculaire (JSM), Rennes, France, 28-30 June 2021
Filling the Gaps in Our Understanding of Plasmas in Simple Diatomic Gases- Combining a DC Plasma in Pure O2 with Multiple Advanced Diagnostics for Experimental Validation of Simulations JP Booth, , IS Plasma 2021, Nagoya, Japan, 8-11 March 2021
Laser Cavity Ringdown Spectroscopy of Oxygen Plasmas : Direct Measurement of the Densities of Oxygen Atoms, Ozone and Negative Ions and Gas Temperature Jean-Paul Booth, Online Low temperature Plasma Seminar (OLTP), 25 May 2021
A new look at Oxygen Plasmas – Quantitative Spectroscopy for rigorous testing of models, J-P Booth, A. Chatterjee. O Guaitella, D Lopaev, S Zyryanov, T Rakhimova, D Voloshin, N de Oliveira and L Nahon, Symposium on Physics of Ionized Gases (SPIG), Sabac, Serbia (virtual conference) 24-28 Aug 2020
A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas, JP Booth, A Chatterjee, O Guaitella, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova,
Central European Symposium on Plasma Chemistry, Gozd Martuljek, Slovenia 26-30 May 2019
A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas, JP Booth, A Chatterjee, O Guaitella, C Drag, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova, Frontiers in low Temperature plasma simulation, Bad Honnef, Germany, 12-16 May 2019
Vacuum ultraviolet absorption spectroscopy of oxygen discharges,
JP Booth, 3rd European Conference on Plasma Diagnostics, Lisbon, Portugal. 6-9 May 2019
Recent Publications
