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Accueil > Pages Personnelles > A-B > Jean-Paul Booth

Jean-Paul Booth


Status : Research Director, 1st class, CNRS
Low Temperature Plasmas Team

Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902

Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex


Research interests

Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009

Publications since 2009
https://www.lpp.polytechnique.fr/-listpubli-?auteur_num=003

Recent Invited Conferences :

The role of translational and vibrational energy in processing plasmas : novel optical diagnostics of low-pressure Cl2 and O2 inductively-coupled plasmas,
1st Asia-Pacific Conference on Plasma Physics, , Chengdu, China, 18-22 September 2017

Probing mechanisms in low-temperature reactive gas plasmas : towards improved models of industrial plasma etch processes.
European Conference on Plasma Diagnostics, Bordeaux, France 18-21 April 2017

Translational and Vibrational Energy in Cl2 and O2 Plasmas Probed by Innovative Optical Diagnostics,
AVS Symposium Nashville USA (November 2016)

Quantitative Diagnostics of Inductive Plasmas in Chlorine, Oxygen and Chlorine-Oxygen Mixtures.
MRS-Japan. Yokohama, 8-10 December 2015.

Quantitative diagnostics of inductive plasmas in Cl2, O2 and CL2/O2, Jean-Paul Booth, Mickäel Foucher, Daniil Marinov and Pascal Chabert,
SAPP XX, Tatranska Lomnica, Slovakia, 17-22 January 2015


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Tutelles : CNRS Ecole Polytechnique Sorbonne Université Université Paris Sud Observatoire de Paris Convention : CEA
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Mentions légales
Exploitant du site : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Hébergeur : Laboratoire de Physique des Plasmas, Ecole Polytechnique route de Saclay F-91128 PALAISEAU CEDEX
Directeur de la publication : Pascal Chabert (Directeur)