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Accueil > Pages Personnelles > A-B > Jean-Paul Booth

Jean-Paul Booth


Status : Research Director, 1st class, CNRS
Low Temperature Plasmas Team

Email : jean-paul.booth lpp.polytechnique.fr
Tel : +33(0)1 6933 5902

Room : 05-1096A
Laboratoire de Physique des Plasmas
Ecole Polytechnique, route de Saclay
F-91128 Palaiseau Cedex


Research interests

Physics and chemistry of electrical discharges in reactive gases and their interaction with surfaces.
Development of novel diagnostic techniques for reactive plasmas : optical techniques for measuring reactive species densities and kinetics, electric fields, and electrical plasma measurements. Laser-induced fluorescence, Ion Flux Probes, cavity ring-down spectroscopy, broad-band absorption spectroscopy, microwave resonance techniques for electron density measurements.
Development of sensors for in-situ control of industrial plasma processes.
Physics of capacitively-coupled radiofrequency plasmas : tailored voltage waveform excitation for control of ion and electron fluxes and energy distributions.
Gas breakdown in RF fields.

Brief vitae

2000-Present : Directeur de Recherche, CNRS at LPP, except :
2006-2008 : Technical Director, Lam Research Corp, Fremont, CA, USA
1990-2000 : Chargé de Recherche, CNRS, Laboratoire de Spectrométrie Physique, Grenoble
1988-1990 : Post-doctoral researcher, CNRS/CNET, Meylan, France
1985-1988 : D. Phil., Physical Chemistry Laboratory, Oxford University, UK
1980-1984 : BA & MA, Chemistry, Oxford University, UK

Distinctions :
2019 : AVS Plasma Science & Technology Division Prize
2010 : Fellow of AVS
1984 : Physical Chemistry Part II Thesis Prize, Oxford University
1980-1983 : Stapeldon Scholarship to Exeter College, Oxford

Editorial responsabilities and Conference organisation
Associate Editor of IoP journal Plasma Sources, Science and Technology
Chair, International Workshop on Oxygen Plasma Kinetics 2016
Chair, Laser-Aided Plasma Diagnostics 2013& 2015
Program Commitee, ICPP 2014
Secretary, AVS Plasma Science and Technology Division, 2012-13
Chair, International Conference on Phenomena in Ionised Gases, 2009

Recent Publications

2020

2 résultats
Article dans une revue
C. Western, Jean-Paul Booth, A. Chatterjee, N. de Oliveira
Rydberg spectra of singlet metastable states of O2
Molecular Physics, Taylor & Francis, 2020, pp.e1741714. ⟨10.1080/00268976.2020.1741714⟩
Article dans une revue
Jean-Paul Booth, Abhyuday Chatterjee, Olivier Guaitella, Joao Santos Sousa, Dmitry Lopaev, S Zyryanov, T Rakhimova, D Voloshin, Yu Mankelevich, Nelson de Oliveira, Laurent Nahon
Determination of absolute O(3P) and O2(a1Δg) densities and kinetics in fully modulated O2 dc glow discharges from the O2(X3Σg -) afterglow recovery dynamics
Plasma Sources Science and Technology, IOP Publishing, In press, ⟨10.1088/1361-6595/abb5e7⟩

2019

3 résultats
Article dans une revue
Jean-Paul Booth, Olivier Guaitella, Abhyuday Chatterjee, Cyril Drag, V. Guerra, Dmitry Lopaev, Sergey Zyryanov, Tatyana Rakhimova, Dmitry Voloshin, Y. Mankelevich
Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma
Plasma Sources Science and Technology, IOP Publishing, 2019, 28 (5), pp.055005. ⟨10.1088/1361-6595/ab13e8⟩
Article dans une revue
A. S Morillo-Candas, Cyril Drag, Jean-Paul Booth, T. C Dias, V. Guerra, Olivier Guaitella
Oxygen atom kinetics in CO2 plasmas ignited in a DC glow discharge
Plasma Sources Science and Technology, IOP Publishing, 2019, 28 (7), pp.075010. ⟨10.1088/1361-6595/ab2b84⟩
Article dans une revue
Junkang Wang, Sébastien Diné, Jean-Paul Booth, Erik Johnson
Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas
Journal of Vacuum Science and Technology A, American Vacuum Society, 2019, 37 (2), pp.021303. ⟨10.1116/1.5056205⟩

2018

7 résultats
Article dans une revue
Sandra Schröter, Apiwat Wijaikhum, Andrew Gibson, Andrew West, Helen Davies, Nicolas Minesi, James Dedrick, Erik Wagenaars, Nelson de Oliveira, Laurent Nahon, Mark Kushner, Jean-Paul Booth, Kari Niemi, Timo Gans, Deborah O'Connell
Chemical kinetics in an atmospheric pressure helium plasma containing humidity
Physical Chemistry Chemical Physics, Royal Society of Chemistry, 2018, 20 (37), pp.24263-24286. ⟨10.1039/c8cp02473a⟩
Article dans une revue
James R. Hamilton, Jonathan Tennyson, Jean-Paul Booth, Timo Gans, Andrew Gibson
Calculated electron impact dissociation cross sections for molecular chlorine (Cl 2 )
Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (9), pp.095008. ⟨10.1088/1361-6595/aada32⟩
Article dans une revue
Adriana Annusova, Daniil Marinov, Jean-Paul Booth, Nishant Sirse, Mrio Lino Da Silva, B. Lopez, V. Guerra
Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas
Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (4), pp.045006. ⟨10.1088/1361-6595/aab47d⟩
Article dans une revue
Frederik Schmidt, J. Schulze, Erik Johnson, Jean-Paul Booth, D. Keil, David M French, Jan Trieschmann, Thomas Mussenbrock
Multi frequency matching for voltage waveform tailoring
Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (9), pp.095012
Article dans une revue
Z. Donkó, A. Derzsi, Ihor Korolov, P. Hartmann, S. Brandt, J. Schulze, B. Berger, M. Koepke, Bastien Bruneau, Erik Johnson, Trevor Lafleur, Jean-Paul Booth, Andrew Gibson, D. O'Connell, T. Gans
Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
Plasma Physics and Controlled Fusion, IOP Publishing, 2018, 60 (1), pp.014010. ⟨10.1088/1361-6587/aa8378⟩
Article dans une revue
Yue Liu, Jean-Paul Booth, Pascal Chabert
Effect of frequency on the uniformity of symmetrical RF CCP discharges
Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (5), pp.055012. ⟨10.1088/1361-6595/aabfb4⟩
Article dans une revue
Yue Liu, Jean-Paul Booth, Pascal Chabert
Plasma non-uniformity in a symmetric radiofrequency capacitively-coupled reactor with dielectric side-wall: a two dimensional particle-in-cell/Monte Carlo collision simulation
Plasma Sources Science and Technology, IOP Publishing, 2018, 27 (2), pp.025006. ⟨10.1088/1361-6595/aaa86e⟩

Full Publication List (HAL)

Recent Invited Conferences :

A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas,
JP Booth, A Chatterjee, O Guaitella, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova,
Central European Symposium on Plasma Chemistry
Gozd Martuljek, Slovenia 26-30 May 2019

A Comprehensive Diagnostic Study of a DC Positive Column in O2 : a test-bed for models of plasmas in a diatomic gas,
JP Booth, A Chatterjee, O Guaitella, C Drag, N De Oliveira, L Nahon, D Lopaev, S Zyryanov, D Voloshin, T Rakhimova
Frontiers in low Temperature plasma simulation
Bad Honnef, Germany, 12-16 May 2019

Vacuum ultraviolet absorption spectroscopy of oxygen discharges,
JP Booth,
3rd European Conference on Plasma Diagnostics
Lisbon, Portugal. 6-9 May 2019

Novel diagnostics to unravel fundamental processes in oxygen plasmas,
JP Booth, A Chatterjee, O Guaitella, C Drag, D Lopaev, S Zyryanov, T Rakhimova, N De Oliveira, L Nahon, C Western,
7th International Conference on Advanced Plasma Technologies,
Hue, Vietnam, 24 Feb-1 Mar 2019

Negative Ions in Plasmas,
J.P.Booth,
Plasma School Master Class, Bad Honnef, DE, 12-13 Oct 2018

High-resolution VUV absorption diagnostics of discharges in oxygen, J.P.Booth, A.Chatterjee, O.Guaitella, N.de Oliveira, L.Nahon, and C.M.Western,
20th Gaseous Electronics Meeting
Magnetic Island,Townsville, Queensland, Australia, 22-24 June 2018,

Kinetics of atoms and metastable molecules in oxygen plasmas revisited : an experimental study
JP Booth, A Chatterjee, O Guaitella, A-S Morillo-Candas, C Drag, D Lopaev, S Zyryanov, N De Oliveira, L Nahon.
10th EU-Japan Joint Symposium on Plasma Processing,
Okinawa, Japan, 4-7 December 2017.


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Directeur de la publication : Dominique Fontaine (Directrice)